Vacuum plasma cleaner
Vacuum plasma cleaning equipment has features as: high precision, fast response, easy manipulation and compatibility, perfect function and professional technical support. The details are as below:
A), It has a high handling uniformity;
B), With lower ionic energy, unable to damage the substrate;
C), Without contamination to the electrodes and the substrates;
D), With patented design of special plasma electrodes;
E), With high density of plasma source;
1), High efficiency of plasma cleaning .
2), Can command low ionic energy.
3), Can combine chemical reactivity and physical impact.
F), With fast processing speed, high cleaning efficiency and reliability.
G), With wide operating range.
H), A wide range of process gases can be used.
I), Fully automatic and easy to operate.
J), The equipment is stable and easy to maintain.
K), Its design can be changed or modified according to customer’s requirements.
Application range: It is applicable for the industries of printed circuit board, semiconductor IC field, silicone, plastic, polymer field, automotive electronics as well as aviation, etc. the details are as following:
1, For printed circuit board industry: To activate the surface of high-frequency board, to clean the surface of multi-layer board, to decontaminate the surface of soft board and soft and hard combination panel, to activate soft panel before reinforcement, are within the capacity of the plasma cleaner.
2, In semiconductor IC field: In COB, COG, COF, ACF process for cleaning before printing and welding, the plasma cleaner is applicable effectively.
3, In the production areas of silicone, plastic, polymer: The plasma cleaner is used for surface roughening, etching, activation, etc.
China Guangdong PVD Metallizer Co.
Alex Li
