好處
- 配有波紋管,可以滿足更苛刻的真空要求
- 直接推/拉啟動
- 使用測微螺絲進行高精度調(diào)節(jié)
- 2011/65/EU RoHS 符合
規(guī)格
類型 | FPU016-H | FPU040-H | FPU016-Z | FPU040-Z | |
---|---|---|---|---|---|
真空連接 | DN 16 CF-R | DN 40 CF-R | DN 16 CF-R | DN 40 CF-R | |
饋入裝置/密封圈 | bellow | bellow | bellow | bellow | |
軸連接 | M4x16mm | M6x10mm, ?10mm | M4x16mm | M6x10mm, ?10mm | |
驅(qū)動裝置 | manual | manual | micrometer screw | micrometer screw | |
行程 | mm | 25 | 50 | 20 | 50 |
每轉(zhuǎn)行程 | mm | - | - | 0.5 | 1 |
刻度 | mm | 5 | 10 | 0.01 | 0.005 |
軸負載 | |||||
徑向力 | N | 20 | 100 | 20 | 100 |
軸向力真空 | N | 85 | 140 | 185 | 440 |
atm 受到的軸向力 | N | 100 | 200 | 200 | 500 |
扭矩 | N?m | 0.2 | 0.5 | 0.2 | 0.5 |
密封度 | mbar?L/s | 5 x 10-11 | 5 x 10-11 | 5 x 10-11 | 5 x 10-11 |
壓力() | 1 x 10-10 mbar ... 2 bar | 1 x 10-10 mbar ... 2 bar | 1 x 10-10 mbar ... 2 bar | 1 x 10-10 mbar ... 2 bar | |
烘烤溫度 | |||||
饋入裝置 | °C | 300 | 300 | 300 | 300 |
測微螺絲 | °C | - | - | 100 | 100 |
暴露于規(guī)程介質(zhì)的材料 | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
重量 | kg | 0.15 | 0.75 | 0.25 | 1 |
零件號
FPU016-H | |
---|---|
零件號 | 明細 |
214-330 | FPU016-H Linear feedthrough DN 16 CF-R |
FPU040-H | |
零件號 | 明細 |
214-332 | FPU040-H Linear feedthrough DN 40 CF-R |
FPU016-Z | |
零件號 | 明細 |
214-334 | FPU016-Z Linear feedthrough DN 16 CF-R |
FPU040-Z | |
零件號 | 明細 |
214-336 | FPU040-Z Linear feedthrough DN 40 CF-R |
數(shù)據(jù)表
三維步驟文件