適合控制化學(xué)藥液的單個成分。
- 實時、高性能檢測多達(dá) 8 種組分
- 無需試劑，零樣品消耗，降低擁有成本
-
安裝簡單，即裝即用
CS-700高精度、高穩(wěn)定性化學(xué)藥液濃度計
HORIBA CS-700 化學(xué)藥液濃度計能夠?qū)?半導(dǎo)體制程中使用的復(fù)雜化學(xué)藥液的單個化學(xué)成分進(jìn)行高性能測量。
通過改進(jìn) HORIBA 的光譜測量技術(shù)，CS-700 測量性能提升高達(dá) 5 倍。
提供增強(qiáng)的質(zhì)量控制，改進(jìn)半導(dǎo)體制程。
適合控制化學(xué)藥液的單個成分。
- 實時、高性能檢測多達(dá) 8 種組分
- 無需試劑，零樣品消耗，降低擁有成本
-
安裝簡單，即裝即用
技術(shù)參數(shù)：
Unit : mass%
| Component | Measurable range | Repeatability | |
|---|---|---|---|
| 1st solution | HNO3 | 30.0 - 34.0 | ±0.5 |
| HF | 2.00 - 4.00 | ±0.10 | |
| H3PO4 | 35.0 - 39.0 | ±0.6 | |
| H2SiF6 | 0.00 - 3.00 | ±0.50 | |
| H2O | 25.0 - 33.0 | ±1.0 |
Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C
- Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
- The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)
Specifications Comparison with Previous Model
| item | CS-100 | CS-700 |
|---|---|---|
| Measurement principle | Absorption spectroscopic method | Absorption spectroscopic method |
| Sample temperature | 20 to 30 Degree C | 20 to 30 Degree C |
| Ambient temperature | 20 to 25 Degree C | 20 to 30 Degree C |
| Components | Max. 4 components | Max. 8 components |
| Chemical range | Max. 4 ranges | Max. 6 ranges |
| Communication | Parallel I/O, Analog output, RS-232C | Parallel I/O, Analog output, RS-232C |
| Analog output (4-20 mA) | Max. 2 components | Max. 6 components |
| Dimension | 205(W) X 329(D) X 269(H)mm | 218(W) X 391(D) X 213(H)mm |
| Power source | DC 24V | DC 24V(Same connecter of CS-100) |
| Consumable parts | Halogen lamp | Halogen lamp (Same as CS-100 type) |
| Wavelength | UV/NIR | UV/NIR |
| Wetted material | PTFE, PFA, Sapphire or Quartz, | PTFE, PFA, Sapphire, Kalrez 4079 O-ring |
