型號描述
型號 8715 是一臺用于調(diào)節(jié)侵蝕性氣體質(zhì)量流量的裝置,它需要一個與介質(zhì)相分離的傳感器。在數(shù)字的電子調(diào)節(jié)設備中,會將傳感器提供的實際值與規(guī)定的額定值進行比較;存在調(diào)節(jié)偏差時,會通過一種 PI 調(diào)節(jié)算法對發(fā)送到比例閥上的調(diào)節(jié)參數(shù)進行修改。這樣一來,就可以將質(zhì)量流量保持在一個確定的數(shù)值上,或使其遵循規(guī)定的曲線輪廓,而不會受到壓力波動或設備中其他變化的影響。 可針對兩種不同的氣體對型號 8715 進行校準,用戶可在兩者之間進行轉換。一個直動式比例閥作為調(diào)節(jié)元件,確保了高反應靈敏度和裝置良好的調(diào)節(jié)特性。通過數(shù)字方式與更高一級的設備進行通訊,這樣一來,就可以省去額外的 D/A 轉換。
1)采用毛細管技術的旁通儀器,適合額定流量范圍 5 mlN/min 至 15 lN/min
2)適合侵蝕性氣體
3)緊湊型版本和數(shù)字通訊
Type Description
The mass flow controller (MFC) type 8715 is especially suited for regulating the mass flow of aggressive gases, which need a sensor which is not in direct contact with the gas. The thermal capillary sensor reaches fast response times. A direct-acting proportional valve from Bürkert guarantees a high sensitivity. The integrated PI controller ensures outstanding control characteristics of the MFC. Type 8715 can optionally be calibrated for two different gases; the user can switch between these two gases. The communication with master devices is fully digital, therefore no further analog/digital conversions are needed.
1)Nominal flow ranges from 0.005 lN/min to 15 lN/min
2)High accuracy and repeatability
3)Applicable for aggressive gases
4)Digital communication via RS485
氣體質(zhì)量流量控制器部分訂貨號如下:
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