好處
- Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s
- Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
- Applicable for vacuum and sniffer leak search
- Minimize leak checking efforts through quick evacuation and response time
- Time saved by easy maneuverability through slim design
- Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
- Easy to use, operator-guided HMI with full color high resolution rotatable display
- UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
- UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump
- UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
- UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.
典型應(yīng)用
- Semiconductor Fabs
- Flat Panel Display manufacturing
- Solar Cell fabrication
- Glass and Web (roll to roll) coating
- General vacuum coating & applications
規(guī)格
類型 | UL3000 Fab / UL3000 Fab ULTRA (***NEW***) | |
---|---|---|
Min. detectable leak rate for helium (vacuum method) | mbar?L/s | < 5 x 10-12 |
Min. detectable leak rate for helium (sniffer mode) | mbar?L/s | < 5 x 10-8 |
Max. Inlet pressure (MASSIVE mode) | mbar | 1000 |
Pumping speed during evacuation | m³/h | >32 >36 |
Helium pumping speed (high sensitive mode ULTRA) | L/s | 4 |
Response time | s | <> |
Time until ready for operation | min | <> |
Detectable masses (ULTRATEST Sensor Technology) | 2, 3, 4 (H2, 3He, He) | |
Ion source | 2 filaments, iridium/yttria oxide coated | |
Test port | DN 25 KF | |
Adjustable triggers | 4 | |
Interfaces | 2 x USB, Ethernet / LAN | |
Supply voltage | 100 to 240 V 50/60 Hz (AC) | |
Power consumption | typ. 700 VA, max. 1500 VA | |
Dimensions (L x W x H) | 1050 x 472 x 987 | |
Weight | kg | 118 132 |
Permissable ambient temperature range (during operation) | °C | 10 to 40 |
Additional Features | Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder |
零件號
UL3000 Fab / UL3000 Fab ULTRA (***NEW***) | |
---|---|
零件號 | 明細 |
550-260 | UL3000 Fab ULTRA |
550-200 | UL3000 Fab |
附件
UL3000 Fab / UL3000 Fab ULTRA (***NEW***) | |
---|---|
零件號 | 明細 |
551-015 | 遙控器 RC1000WL,無線,包括無線發(fā)射機 |
551-010 | 遙控器 RC1000C,有線,帶 4 米卷線 |
551-202 | Vaccuum Hose Holder for UL3000 Fab (incl. for ULTRA version) |
525-001 | 3米吸槍 |
525-002 | 5米吸槍 |
525-003 | SL3000-10, sniffer line 10 m length |
551-203 | Bracket for SL3000 |
551-210 | SL200, Sniffer line + el. extension for UL3000 |
551-201 | Helium Bottle Holder |
560-310 | I/O 1000 模塊 |
560-315 | BM1000 Profibus 模塊 |
560-316 | BM1000 PROFINET IO 模塊 |
560-317 | BM1000 DeviceNet module |
560-318 | BM1000 Ethernet/IP module |
560-334 | Data cable 0,5m I/O1000, BM10000 |
560-332 | 數(shù)據(jù)電纜(2 米) |
560-335 | 數(shù)據(jù)電纜(5 米) |
560-340 | 數(shù)據(jù)電纜(10 米) |
551-005 | TC1000Test Chamber,DN25KF,ESD wrist band |
551-205 | extension cable for TC1000/SL200, UL3000 |
耗材
UL3000 Fab / UL3000 Fab ULTRA (***NEW***) | |
---|---|
零件號 | 明細 |
200007656 | Airfilter Kit UL3 Housing Ventilation |
備件
UL3000 Fab / UL3000 Fab ULTRA (***NEW***) | |
---|---|
零件號 | 明細 |
200000683 | Replacement filter (2 pcs) for flood and |
200000913 | Exhaust filter UL1000 |
200001095 | Spare part, flood filter |
200001680 | 過濾套件10PCS P3000/XL適配器/T-Guard |
200003801 | Oil wick cartridge HiPace 50/80 |
200007617 | Inlet flange UL3 |
200007624 | Vacuum Hose DN25 UL3 |
200007631 | TriScroll TS620 + Inverter UL3 |
200007653 | Fan 4414N 24 V DC UL3 |
200007655 | Fan 8314H 24 V DC UL3 |
手冊
手冊
目錄
其他文件